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Intelligent Systems in Semiconductor Process Control Collaborators: University of Maine Contact: Mohamad Musavi, Habtom Ressom Project Summary Semiconductor manufacturing is arguably one of the most important and rapidly-growing industries in the world today. As competition increases, increased process control capability is essential to reducing prices and improving the ability of a company to remain viable in a fiercely competitive market. The use of fuzzy logic, neural networks, and neuro-fuzzy systems can help in reducing process variability and subsequently driving yield increases and higher profits. Several such intelligent systems have been examined; one of these systems has been explored in limited production testing. The production tests, in conjunction with other efforts, led to remarkable process capability increase and a patent is being sought. |
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